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A087384 as a simple table

na(n)
12
22
33
47
511
617
753
843
9103
10331
11179
12433
13467
145279
151831
165923
176389
187753
198363
2027061
2121893
2235423
231146281
2492737
253001001
261213931
27392837
281906867
294113833
304992241
315385077
3217426473
3314098313
3491246193
35110729581
3644791057
37144946903
38938116057

[2,2,3,7,11,17,53,43,103,331,179,433,467,5279,
 1831,5923,6389,7753,8363,27061,21893,35423,
 1146281,92737,3001001,1213931,392837,1906867,
 4113833,4992241,5385077,17426473,14098313,
 91246193,110729581,44791057,144946903,938116057]