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A051323 as a simple table

na(n)
167
22
33
413
55227
67
75
84637
9107
1023
111889
1250929
1331
141677554191669
15538282187
1659
1737
1817046661
1981088366624779421
2011
216242880316142699576539967984792911
2273
2317
241187
25101
26883
273491
2847
2983
30852851
31317
321493
33579707
34109
351579145715181
36179
371618489
38331

[67,2,3,13,5227,7,5,4637,107,23,1889,50929,31,
 1677554191669,538282187,59,37,17046661,
 81088366624779421,11,
 6242880316142699576539967984792911,73,17,1187,101,
 883,3491,47,83,852851,317,1493,579707,109,
 1579145715181,179,1618489,331]