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A007164 as a simple table

na(n)
11
22
37
431
5167
6999
76495
844619
9319463
102356406
1117775821
12136405506
131060866006
148339982193
1566147792753
16528559162227
174250413757583
1834368723106860
19279254390054538
202278795583070154
2118667432144042678
22153452484745198722

[1,2,7,31,167,999,6495,44619,319463,2356406,
 17775821,136405506,1060866006,8339982193,
 66147792753,528559162227,4250413757583,
 34368723106860,279254390054538,2278795583070154,
 18667432144042678,153452484745198722]