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A294132 as a simple table

na(n)
15
213
317
497
5257
6401
7769
81153
93041
1014177
1165537
12286721
131810433
142752513
154043777
167340033
1713631489
1823068673
1972222721
20319291393
21348061697
22625483777
233937533953
2454498164737
25106216554497
26121899667073
27151597350913
28342456532993

[5,13,17,97,257,401,769,1153,3041,14177,65537,
 286721,1810433,2752513,4043777,7340033,13631489,
 23068673,72222721,319291393,348061697,625483777,
 3937533953,54498164737,106216554497,121899667073,
 151597350913,342456532993]