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A287063 as a simple table

na(n)
13
29
339
4183
5833
63629
715291
863051
9256605
101036401
114167815
1216720031
1366986169
14268173525
151073185011
164293787923
1717177379125
1868714234201
19274866897279
201099488559527
214397998277073
2217592085381629
2370368534463019
24281474540503643
251125899000873613

[3,9,39,183,833,3629,15291,63051,256605,1036401,
 4167815,16720031,66986169,268173525,1073185011,
 4293787923,17177379125,68714234201,274866897279,
 1099488559527,4397998277073,17592085381629,
 70368534463019,281474540503643,1125899000873613]