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A167564 as a simple table

na(n)
11
23
311
447
5241
61457
710223
881835
9736637
107366661
1181034027
12972410303
1312641339465
14176978768137
152654681568551
1642474905237267
17722073389475733
1812997321011978125
19246949099232271587
204938981984661217191

[1,3,11,47,241,1457,10223,81835,736637,7366661,
 81034027,972410303,12641339465,176978768137,
 2654681568551,42474905237267,722073389475733,
 12997321011978125,246949099232271587,
 4938981984661217191]