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A093817 as a simple table

na(n)
21
35
413
529
661
75
823
9509
101021
11409
124093
13431
1416381
156553
1671
172473
1823831
1997
201048573
212713
224194301
231677721
2416777213
2570051
265197
2731033
281877171
29536870909
3046684427
3122605091
32464773
33296204641
343360037
356871947673
36283007

[1,5,13,29,61,5,23,509,1021,409,4093,431,16381,
 6553,71,2473,23831,97,1048573,2713,4194301,
 1677721,16777213,70051,5197,31033,1877171,
 536870909,46684427,22605091,464773,296204641,
 3360037,6871947673,283007]