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A084171 as a simple table

na(n)
01
13
211
337
4119
5373
61151
73517
810679
932293
1097391
11293197
12881639
132649013
147955231
1523882077
1671678999
17215102533
18645438671
191936578157
205810258759
2117431824853
2252297571711
23156896909437
24470699116919
251412114127973

[1,3,11,37,119,373,1151,3517,10679,32293,97391,
 293197,881639,2649013,7955231,23882077,71678999,
 215102533,645438671,1936578157,5810258759,
 17431824853,52297571711,156896909437,470699116919,
 1412114127973]