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A084161 as a simple table

na(n)
02
15
217
373
4113
5197
6461
71493
81801
99533
1015661
1116741
1233181
1339581
1450593
15180797
16183089
171561829
181637813
192243909
204468889
214874717
227856441
2310087201
2412021029
2512213913
2618226661
27148363637
28292182097
29320262253
30468213937

[2,5,17,73,113,197,461,1493,1801,9533,15661,16741,
 33181,39581,50593,180797,183089,1561829,1637813,
 2243909,4468889,4874717,7856441,10087201,12021029,
 12213913,18226661,148363637,292182097,320262253,
 468213937]