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A066364 as a simple table

na(n)
13
237
3163
4757
51999
65477
78803
89397
913627
1015649
1136187
1240879
1362597
14106277
15147853
16161839
17215893
18231643
19281683
20295759
21313471
22333667
23338293
24478243
25490573
26607837
27647357
28743933
29988643
301014877
311056241
321168711
331353173
341390757
351487867
361519591
371627523
381835083
391912969
402028119
412029759
422064529

[3,37,163,757,1999,5477,8803,9397,13627,15649,
 36187,40879,62597,106277,147853,161839,215893,
 231643,281683,295759,313471,333667,338293,478243,
 490573,607837,647357,743933,988643,1014877,
 1056241,1168711,1353173,1390757,1487867,1519591,
 1627523,1835083,1912969,2028119,2029759,2064529]