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A020521 as a simple table

na(n)
013
18191
222369621
378536544841
4300239975158033
51190112520884487201
64797324681010433232961
719495118728903626376364161
879538861190790864407636279553
9325153619321163373997995856232961
101330527338889299954891005307651097601

[13,8191,22369621,78536544841,300239975158033,
 1190112520884487201,4797324681010433232961,
 19495118728903626376364161,
 79538861190790864407636279553,
 325153619321163373997995856232961,
 1330527338889299954891005307651097601]